Patent Assignment
Reel/Frame 018215/0423
Assignment of Assignor's Interest
Recorded: 2006-08-17
Pages: 7
Assignors
HARDIKAR, VISHWAS
Executed: 2006-08-14
BERTSCH, KEVIN
Executed: 2006-08-10
SELIMOVIC, MIGDAD
Executed: 2006-08-10
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Apparatus and Method for Cleaning and Removing Liquids from Front and Back Sides of a Rotating Workpiece