Patent Assignment
Reel/Frame 018229/0396
Assignment of Assignor's Interest
Recorded: 2006-09-11
Pages: 3
Assignor
NAKAISO, NAOHARU
Executed: 2006-08-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
3-14-20, HIGASHI-NAKANO, NAKANO-KU, TOKYO, 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Device Producing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.