Patent Assignment
Reel/Frame 018257/0967
Assignment of Assignor's Interest
Recorded: 2006-08-31
Pages: 3
Assignor
ASHIZAWA, KENGO
Executed: 2006-08-01
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Vacuum processing apparatus and zonal airflow generating unit