Patent Assignment
Reel/Frame 018259/0438
Assignment of Assignor's Interest
Recorded: 2006-09-01
Pages: 2
Assignor
LOF, JOERI
Executed: 2006-08-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-554 DR, VELDHOVEN, NETHERLANDS
Covered Property
(1)
Individual Wafer History Storage for Overlay Corrections