Patent Assignment
Reel/Frame 018263/0188
Assignment of Assignor's Interest
Recorded: 2006-09-15
Pages: 2
Assignors
FUKAZAWA, ATSUKI
Executed: 2006-09-13
MATSUKI, NOBUO
Executed: 2006-09-14
UMEMOTO, SEIJIRO
Executed: 2006-09-15
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method for Forming Insulation Film