Patent Assignment
Reel/Frame 018280/0577
Assignment of Assignor's Interest
Recorded: 2006-09-20
Pages: 4
Assignors
KWAN, YIM-BUN PATRICK
Executed: 2006-09-05
GEUPPERT, BERNHARD
Executed: 2006-09-11
KEMPER, NICO
Executed: 2006-09-08
Assignees
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
ASML NETHERLANDS B.V.
DERUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Structure for Use in a Projection Exposure System for Manufacturing Semiconductors
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.