Patent Assignment
Reel/Frame 018295/0406
Assignment of Assignor's Interest
Recorded: 2006-09-25
Pages: 9
Assignors
ULRICH, WILHELM
Executed: 2006-07-11
OKON, THOMAS
Executed: 2006-07-11
WABRA, NORBERT
Executed: 2006-08-03
GRUNER, TORALF, DR.
Executed: 2006-07-12
BITTNER, BORIS
Executed: 2006-07-17
GRAESCHUS, VOLKER
Executed: 2006-07-12
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for correcting a lithography projection objective, and such a projection objective
Application:
11/479,574 →
Publication:
US 2007/0019305
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.