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Patent Assignment
Reel/Frame 018295/0755

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2006-09-13 Received: 2006-09-20 Pages: 3
Assignors
EISNER, EDWARD C.
Executed: 2006-09-12
VANDERBERG, BO H.
Executed: 2006-09-12
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES
Covered Applications (2)
SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
App. No. 11/520,190
→
ELECTRODE
App. No. 29/256,133
→