Granted Patent
Utility
US 7,227,160
· Confirmation No. 8428
SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
Patented Case
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2023-07-03 | MF.AD.PAIR |
Maintenance Fee Address Change for PAIR | 1 | View | |
| 2023-07-03 | C.AD.PAIR |
Change of Address via Patent Application Information Retrieval (PAIR) | 1 | View | |
| 2007-05-16 | ISSUE.NTF |
Issue Notification | 1 | View | |
| 2007-04-26 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2007-02-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2007-02-23 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2007-02-23 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2007-02-23 | 892 |
List of references cited by examiner | 1 | View | |
| 2007-02-23 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-02-23 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2007-02-23 | FWCLM |
Index of Claims | 1 | View | |
| 2007-02-23 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2007-02-15 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2007-01-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2007-01-22 | CLM |
Claims | 4 | View | |
| 2007-01-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2007-01-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2006-12-22 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2006-12-22 | FWCLM |
Index of Claims | 1 | View | |
| 2006-12-22 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2006-09-13 | TRNA |
Transmittal of New Application | 2 | View | |
| 2006-09-13 | SPEC |
Specification | 19 | View | |
| 2006-09-13 | CLM |
Claims | 4 | View | |
| 2006-09-13 | ABST |
Abstract | 1 | View | |
| 2006-09-13 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2006-09-13 | OATH |
Oath or Declaration filed | 2 | View | |
| 2006-09-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2006-09-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2006-09-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2006-09-13 | 136A |
Authorization for Extension of Time all replies | 2 | View |
Inventors
Bo H. Vanderberg
Gloucester, MA
Edward C. Eisner
Lexington, MA
Attorneys & Agents of Record
Classification
USPC
250/492.21
H01J37/3171
H01J37/1471
H01J37/1472
H01J2237/24528
Prosecution
- Examiner
- NGUYEN, KIET TUAN
- Art Unit
- 2881
- Customer No.
- 193702
- Docket No.
- 06-IMP-028
- Confirmation No.
- 8428
Patent Term Adjustment
0days
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-09-13
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Quick Facts
- Patent No.
- US 7,227,160
- App. No.
- 11/520,190
- Filed
- 2006-09-13
- Granted
- 2007-06-05
- Examiner
- NGUYEN, KIET TUAN
- Art Unit
- 2881
- PTA
- 0 days
External Links