IP Library Granted Patent US 7,227,160
Granted Patent Utility
US 7,227,160 · Confirmation No. 8428

SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS

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2023-07-03 MF.AD.PAIR Maintenance Fee Address Change for PAIR 1 View
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2007-05-16 ISSUE.NTF Issue Notification 1 View
2007-04-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2007-02-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2007-02-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2007-02-23 1449 List of References cited by applicant and considered by examiner 1 View
2007-02-23 892 List of references cited by examiner 1 View
2007-02-23 SRFW Search information including classification, databases and other search related notes 1 View
2007-02-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2007-02-23 FWCLM Index of Claims 1 View
2007-02-23 BIB Bibliographic Data Sheet 1 View
2007-02-15 SRNT Examiner's search strategy and results 2 View
2007-01-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-01-22 CLM Claims 4 View
2007-01-22 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-01-22 WFEE Fee Worksheet (SB06) 1 View
2006-12-22 CTRS Requirement for Restriction/Election 4 View
2006-12-22 FWCLM Index of Claims 1 View
2006-12-22 BIB Bibliographic Data Sheet 1 View
2006-09-13 TRNA Transmittal of New Application 2 View
2006-09-13 SPEC Specification 19 View
2006-09-13 CLM Claims 4 View
2006-09-13 ABST Abstract 1 View
2006-09-13 DRW Drawings-only black and white line drawings 6 View
2006-09-13 OATH Oath or Declaration filed 2 View
2006-09-13 WFEE Fee Worksheet (SB06) 1 View
2006-09-13 WFEE Fee Worksheet (SB06) 1 View
2006-09-13 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-09-13 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
Patent No.
US 7,227,160
App. No.
11/520,190
Filed
2006-09-13
Granted
2007-06-05
Art Unit
2881
PTA
0 days