Patent Assignment
Reel/Frame 018298/0353
Assignment of Assignor's Interest
Recorded: 2006-09-12
Pages: 2
Assignors
SHIBATA, YUKIHIRO
Executed: 2006-07-19
MAEDA, SHUNJI
Executed: 2006-07-19
NISHIYAMA, HIDETOSHI
Executed: 2006-07-27
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen