Assignment of Assignor's Interest

Recorded: 2006-09-01 Pages: 3

Assignor

SINGER, WOLFGANG

Executed: 2006-05-30

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Oblique Mirror-Type Normal-Incidence Collector System for Light Sources, Particularly Euv Plasma Discharge Sources

Patent: 7,781,750 →

Application: 10/569,574 →

Publication: US 2007/0058244

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.