Patent Assignment
Reel/Frame 018315/0476
Assignment of Assignor's Interest
Recorded: 2006-09-20
Pages: 5
Assignors
FRERIKS, JOHANNES MARIA
Executed: 2006-08-30
BANINE, VADIM YEVGENYEVICH
Executed: 2006-08-30
IVANOV, VLADIMIR VITALEVITCH
Executed: 2006-08-21
KLUNDER, DERK JAN WILFRED
Executed: 2006-07-06
VAN HERPEN, MAARTEN MARINUS JOHANNES WILHELMUS
Executed: 2006-07-07
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method for Cleaning a Lithographic Apparatus Module, a Cleaning Arrangement and a Lithographic Apparatus Comprising the Cleaning Arrangement