Assignment of Assignor's Interest

Recorded: 2006-09-29 Pages: 2

Assignor

SCHUSTER, KARL-HEINZ

Executed: 2006-09-21

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY

Covered Property (1)

Phase Delay Element and Method for Producing a Phase Delay Element

Application: 11/465,244 →

Publication: US 2007/0039543

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.