Patent Assignment
Reel/Frame 018334/0642
Assignment of Assignor's Interest
Recorded: 2006-09-22
Pages: 3
Assignors
SEKIGUCHI, KENJI
Executed: 2006-09-15
UCHIDA, NORITAKA
Executed: 2006-09-15
TANAKA, SATORU
Executed: 2006-09-15
OHNO, HIROKI
Executed: 2006-09-15
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus