Patent Assignment
Reel/Frame 018346/0660
Assignment of Assignor's Interest
Recorded: 2006-10-04
Pages: 8
Assignors
FUJIWARA, HIDEKI
Executed: 2006-09-25
IKEZAWA, KAZUHIRO
Executed: 2006-09-25
TAGUCHI, HIROAKI
Executed: 2006-09-25
ISHII, TOSHINORI
Executed: 2006-09-25
KOMEKYU, TAKASHI
Executed: 2006-09-25
IWAMOTO, NAOFUMI
Executed: 2006-09-25
Assignees
SUMCO CORPORATION
2-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, JAPAN
MITSUBISHI MATERIALS CORPORATION
5-1, OTEMACHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Silicon Electrode Plate for Plasma Etching with Superior Durability