Patent Assignment
Reel/Frame 018348/0815
Assignment of Assignor's Interest
Recorded: 2006-09-26
Pages: 3
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2006-07-10
DEN BOEF, ARIE JEFFREY
Executed: 2006-07-10
MOS, EVERHARDUS CORNELIS
Executed: 2006-07-10
KEIJ, STEFAN CAROLUS JACOBUS ANTONIUS
Executed: 2006-06-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization