Patent Assignment
Reel/Frame 018352/0374
Assignment of Assignor's Interest
Recorded: 2006-10-04
Pages: 2
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Objective for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.