Patent Assignment
Reel/Frame 018355/0465
Assignment of Assignor's Interest
Recorded: 2006-09-27
Pages: 3
Assignor
YOO, DO-YUL
Executed: 2006-09-14
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Overlay Key, Method of Forming the Overlay Key and Method of Measuring Overlay Accuracy Using the Overlay Key