Patent Assignment
Reel/Frame 018357/0625
Assignment of Assignor's Interest
Recorded: 2006-09-28
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Chamber Temperature Process and Chamber Design for Photo-Resist Stripping and Post-Metal Etch Passivation