Patent Assignment
Reel/Frame 018384/0675
Assignment of Assignor's Interest
Recorded: 2006-10-10
Pages: 13
Assignor
OH, HILARIO L.
Executed: 2002-04-11
Assignee
ASML HOLDING N.V.
CORPORATE IP BUILDING 7, DE RUN 6501, VELDHOVEN, 5504 DR, NETHERLANDS
Covered Property
(1)
Method and System to Compensate for Scanner System Timing Variability in a Semiconductor Wafer Fabrication System