Patent Assignment
Reel/Frame 018388/0030
Assignment of Assignor's Interest
Recorded: 2006-09-01
Pages: 6
Assignors
KANNO, ITARU
Executed: 2006-07-29
HIROTA, YUSAKU
Executed: 2006-07-29
SEKIGUCHI, KENJI
Executed: 2006-07-11
NAGAYASU, HIROSHI
Executed: 2006-08-07
SHIMOSE, SHOUICHI
Executed: 2006-08-22
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Two-Fluid Nozzle for Cleaning Substrate and Substrate Cleaning Apparatus