Patent Assignment
Reel/Frame 018395/0933
Assignment of Assignor's Interest
Recorded: 2006-10-13
Pages: 3
Assignors
JI, BING
Executed: 2006-09-28
EDELBERG, ERIK A.
Executed: 2006-10-04
YANAGAWA, TAKUMI
Executed: 2006-09-29
HUANG, ZHISONG
Executed: 2006-09-29
LI, LUMIN
Executed: 2006-09-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 4538
Covered Property
(1)
Method for Plasma Etching Performance Enhancement