Patent Assignment
Reel/Frame 018396/0836
Assignment of Assignor's Interest
Recorded: 2006-10-06
Pages: 2
Assignors
BOGART, JEFF A.
Executed: 2006-10-06
SHARPLESS, LEONARD
Executed: 2006-10-06
SINGH, HARMEET
Executed: 2006-10-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods of and Apparatus for Accessing a Process Chamber Using a Dual Zone Gas Injector with Improved Optical Access