Patent Assignment
Reel/Frame 018397/0540
Assignment of Assignor's Interest
Recorded: 2006-10-17
Pages: 2
Assignors
YAMAGUCHI, MAYUMI
Executed: 2006-09-27
IZUMI, KONAMI
Executed: 2006-09-26
TATEISHI, FUMINORI
Executed: 2006-09-26
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Micro Electro Mechanical System, Semiconductor Device, and Manufacturing Method Thereof