Patent Assignment
Reel/Frame 018414/0535
Assignment of Assignor's Interest
Recorded: 2006-10-13
Pages: 3
Assignors
AKIMOTO, MASAMI
Executed: 2006-08-30
HAYASHI, SHINICHI
Executed: 2006-10-02
HAYASHIDA, YASUSHI
Executed: 2006-10-05
MATSUOKA, NOBUAKI
Executed: 2006-10-02
KIMURA, YOSHIO
Executed: 2006-10-05
UEDA, ISSEI
Executed: 2006-10-05
ITO, HIKARU
Executed: 2006-10-11
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Coating and Developing Apparatus