Patent Assignment
Reel/Frame 018415/0093
Assignment of Assignor's Interest
Recorded: 2006-10-13
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method for Cleaning Substrate Processing Apparatus, Substrate Processing Apparatus, Program and Recording Medium Having Program Recorded Therein