Patent Assignment
Reel/Frame 018438/0985
Assignment of Assignor's Interest
Recorded: 2006-10-19
Pages: 3
Assignors
YAMAMOTO, TARO
Executed: 2006-09-26
KYOUDA, HIDEHARU
Executed: 2006-09-26
KAWASAKI, TETSU
Executed: 2006-09-26
SHIMURA, SATORU
Executed: 2006-09-26
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Cleaning Device and Substrate Cleaning Method