Patent Assignment
Reel/Frame 018461/0392
Assignment of Assignor's Interest
Recorded: 2006-10-26
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Temperature Controlled Substrate Holder with Non-Uniform Insulation Layer for a Substrate Processing System