Patent Assignment
Reel/Frame 018467/0138
Assignment of Assignor's Interest
Recorded: 2006-10-26
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Method and System for Dry Etching a Hafnium Containing Material