Patent Assignment
Reel/Frame 018476/0689
Assignment of Assignor's Interest
Recorded: 2006-10-27
Pages: 2
Assignor
SOGARD, MICHAEL
Executed: 2006-10-24
Assignee
NIKON CORPORATION
2-3 MARUNOUCHI, 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Measurement of Euv Intensity