Patent Assignment
Reel/Frame 018491/0962
Assignment of Assignor's Interest
Recorded: 2006-11-07
Pages: 6
Assignors
SHAMIRYAN, DENIS
Executed: 2006-10-31
PARASCHIV, VASILE
Executed: 2006-11-06
DEMAND, MARC
Executed: 2006-10-31
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Plasma composition for selective high-k etch
Application:
60/839,897 →