IP Library › Patent Application 60839897
Patent Application Provisional
App. No. 60/839,897 · Confirmation No. 4686

Plasma composition for selective high-k etch

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2006-08-23 TRNA Transmittal of New Application 3 View
2006-08-23 SPEC Specification 14 View
2006-08-23 CLM Claims 5 View
2006-08-23 ABST Abstract 1 View
2006-08-23 DRW Drawings-only black and white line drawings 4 View
2006-08-23 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/839,897
Filed
2006-08-23