Patent Assignment
Reel/Frame 018495/0866
Assignment of Assignor's Interest
Recorded: 2006-11-02
Pages: 4
Assignors
KIEHLBAUCH, MARK W.
Executed: 2006-08-08
DAUGHERTY, JOHN E.
Executed: 2006-10-30
SINGH, HARMEET
Executed: 2006-10-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods of Removing Metal Contaminants from a Component for a Plasma Processing Apparatus