Patent Assignment
Reel/Frame 018497/0255
Assignment of Assignor's Interest
Recorded: 2006-11-03
Pages: 2
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JAPAN
Covered Property
(1)
A Teaching Apparatus and Method of Teaching a Wafer Carrying Apparatus a Target Position for Placing and Removing Semiconductor Wafers on and Off a Wafer Boat Using an Imaging Device and Distance Sensor
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.