Patent Assignment
Reel/Frame 018528/0777
Assignment of Assignor's Interest
Recorded: 2006-11-14
Pages: 2
Assignors
ISHII, YUUKI
Executed: 2006-10-24
SUZUKI, HIROYUKI
Executed: 2006-10-24
OKITA, SHINICHI
Executed: 2006-10-24
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Exposure method, exposure system, and substrate processing apparatus