Patent Assignment
Reel/Frame 018570/0038
Assignment of Assignor's Interest
Recorded: 2006-11-15
Pages: 4
Assignors
DUSA, MIRCEA
Executed: 2006-09-29
NACKAERTS, AXEL
Executed: 2006-10-02
VERHAEGEN, GUSTAAF
Executed: 2006-10-03
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Semiconductor Device for Measuring an Overlay Error, Method for Measuring an Overlay Error, Lithographic Apparatus and Device Manufacturing Method