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Patent Assignment
Reel/Frame 018581/0861

Assignment of Assignor's Interest

Recorded: 2006-11-29 Pages: 4
Assignors
SHAFER, DAVID R.
Executed: 2006-03-27
BEDER, SUSANNE
Executed: 2006-02-24
SCHUSTER, KARL-HEINZ
Executed: 2006-03-07
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property (1)
Objectives as a Microlithography Projection Objective with at Least One Liquid Lens
Patent: 7,385,764 →
Application: 10/562,257 →
Publication: US 2006/0221456
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Nov 29, 2006
From: SINGER, WOLFGANG
To: CARL ZEISS SMT AG
Reel/Frame 018565/0033 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →