Patent Assignment
Reel/Frame 018585/0812
Assignment of Assignor's Interest
Recorded: 2006-12-05
Pages: 2
Assignors
HUANG, CHENG-LIN
Executed: 2006-11-06
HSIEH, CHING-HUA
Executed: 2006-11-06
SHUE, SHAU-LIN
Executed: 2006-11-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Cleaning Processes in the Formation of Integrated Circuit Interconnect Structures