Patent Assignment
Reel/Frame 018609/0527
Assignment of Assignor's Interest
Recorded: 2006-11-16
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Writing Method and Writing Apparatus of Charged Particle Beam, Positional Deviation Measuring Method, and Position Measuring Apparatus