Patent Assignment
Reel/Frame 018612/0161
Assignment of Assignor's Interest
Recorded: 2006-12-11
Pages: 4
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma Reactor Control by Translating Desired Values of M Plasma Parameters to Values of N Chamber Parameters