Assignment of Assignor's Interest

Recorded: 2006-12-08 Pages: 2

Assignors

ITATANI, HIDEHARU

Executed: 2006-09-29

HORII, SADAYOSHI

Executed: 2006-09-29

YANAI, HIDEHIRO

Executed: 2006-09-29

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTO-KANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, and Method for Manufacturing Semiconductor Device

Patent: 7,648,578 →

Application: 11/547,137 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.