Patent Assignment
Reel/Frame 018629/0861
Assignment of Assignor's Interest
Recorded: 2006-12-13
Pages: 4
Assignors
SADJADI, S.M. REZA
Executed: 2006-11-13
HUANG, ZHISONG
Executed: 2006-11-13
SAM, JOSE TONG
Executed: 2006-11-13
LENZ, ERIC H.
Executed: 2006-11-13
DHINDSA, RAJINDER
Executed: 2006-11-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Fast gas switching plasma processing apparatus
Application:
11/601,293 →
Publication:
US 2007/0066038