Patent Assignment
Reel/Frame 018630/0819
Change of Name
Recorded: 2006-12-13
Pages: 4
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2002-10-30
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System Particularly for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.