Patent Assignment
Reel/Frame 018640/0142
Assignment of Assignor's Interest
Recorded: 2006-11-27
Pages: 2
Assignors
TAKAGI, MAKOTO
Executed: 2006-11-08
ISHII, YUWA
Executed: 2006-11-08
YOKOTA, TOORU
Executed: 2006-11-09
FUKUI, TATSUO
Executed: 2006-11-10
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Method of Adjusting Optical Imaging System, Positional Deviation Detecting Mark, Method of Detecting Positional Deviation, Method of Detecting Position, Position Detecting Device and Mark Identifying Device