Patent Assignment
Reel/Frame 018644/0198
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2006-12-04
Received: 2006-12-11
Pages: 3
Assignor
BERRY III, IVAN L.
Executed: 2006-12-04
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES