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App. No. 11/633,694 · Confirmation No. 2975

USE OF ION INDUCED LUMINESCENCE (IIL) AS FEEDBACK CONTROL FOR ION IMPLANTATION

Inventor: Ivan L. Berry III
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2023-07-03 MF.AD.PAIR Maintenance Fee Address Change for PAIR 1 View
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2008-12-17 ISSUE.NTF Issue Notification 1 View
2008-12-02 WFEE Fee Worksheet (SB06) 2 View
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2008-12-02 IFEE Issue Fee Payment (PTO-85B) 1 View
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2008-10-02 892 List of references cited by examiner 1 View
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2008-10-02 FWCLM Index of Claims 1 View
2008-10-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2008-10-02 SRNT Examiner's search strategy and results 5 View
2008-10-02 1449 List of References cited by applicant and considered by examiner 3 View
2008-10-02 BIB Bibliographic Data Sheet 1 View
2008-09-22 SRNT Examiner's search strategy and results 1 View
2008-06-05 NTC.PUB Notice of Publication 1 View
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2006-12-04 TRNA Transmittal of New Application 3 View
2006-12-04 SPEC Specification 17 View
2006-12-04 CLM Claims 9 View
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Quick Facts
App. No.
11/633,694
Filed
2006-12-04
Granted
2009-01-06
Pub. No.
US20080128621A1
Art Unit
2878
PTA
0 days