Patent Assignment
Reel/Frame 018660/0155
Assignment of Assignor's Interest
Recorded: 2006-12-11
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398 HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Irradiation Apparatus, Laser Irradiation Method, and Manufacturing Method of Semiconductor Device