Patent Assignment
Reel/Frame 018661/0905
Assignment of Assignor's Interest
Recorded: 2006-12-06
Pages: 6
Assignors
EHM, DIRK HEINRICH
Executed: 2006-11-10
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2006-11-23
WOLSCHRIJN, BASTIAAN THEODOOR
Executed: 2006-10-25
MEIJERINK, MARCUS GERHARDUS HENDRIKUS
Executed: 2006-10-26
STEIN, THOMAS
Executed: 2006-11-06
Assignees
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NETHERLANDS
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Cleaning Method, Apparatus and Cleaning System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.