Patent Assignment
Reel/Frame 018663/0763
Assignment of Assignor's Interest
Recorded: 2006-12-04
Pages: 3
Assignors
HONDA, MASANOBU
Executed: 2006-11-01
HAYAMI, TOSHIHIRO
Executed: 2006-11-21
MATSUI, YUTAKA
Executed: 2006-11-03
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Structure for Plasma Processing Chamber, Plasma Processing Chamber, Plasma Processing Apparatus, and Plasma Processing Chamber Component