Patent Assignment
Reel/Frame 018670/0257
Assignment of Assignor's Interest
Recorded: 2006-12-05
Pages: 2
Assignor
NAKAYAMA, TOMOO
Executed: 2006-11-28
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JAPAN
Covered Property
(1)
Method of Cleaning Plasma Etching Apparatus, and Thus-Cleanable Plasma Etching Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.